TZTEK’s AOI equipment for array processing adopts TZTEK’s independently developed Virgo software platform and a unique platform calibration technology. It is suitable for defect detection in array substrates throughout the manufacturing process, and features fast scanning speed and high imaging accuracy (detection precision of 1.0 μm/1.5 μm available).
TZTEK's unique calibration platform technology supports better image stitching and realizes regional detection. Periodic comparison is adopted for the AA zones, while panel-to-panel comparison is adopted for the peripheral zones
TZTEK’s independently developed Virgo software platform supports the creation of rectangular, circular, semicircular, and other irregular maps
Detection precision of 1.0 μm / 1.5 μm available